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Voltage contrast method in ESEM
Krňávek, Martin ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains theoretical description of basic features and principles of electron microscopy, with focus on environmental scanning electron microscopy. It describes function of the microscope, interactions that takes place after collision of electron pack with a sample, mainly it describes creation of back reflected electrons and secondary electrons and methods of voltage contrast. The practical part focus on voltage contrast issue by observing decomposition of electric potentials on surface of semiconductor devices and it establishes ideal working conditions for observing voltage contrast by scintillation detector of secondary electrons.
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Using Cosmos FloWorks for analyse the detector.
Bordovský, Petr ; Špinka, Jiří (referee) ; Maxa, Jiří (advisor)
This work deal with the analysis of influence of pressure‘s sizes in vacuum chamber of specimen Evironmental Scanning Electron Microscope and the influence of sizes of aperture diaphragm by scintillation detector. The analysis proceeds in detector of secondary electrons. The detector is modelled by system 3D CAD SolidWorks with the help of system CAE Cosmos FloWorks.
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Ionization Detector for Variable Pressure SEM
Černoch, David ; Špinka, Jiří (referee) ; Jirák, Josef (advisor)
This graduation theises deal with influence of an additional grating possitioned berween the sample and the ionisation detektor of the environmental scannin elektron microscope on signal detection. Signal level is measured for changing pressure, at different voltages on the aditional grating, at different sample - additional electrode distance and at different sample - detektor distance. Influence of the additional grating is simulated for real working conditions on PC.
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Voltage contrast method in ESEM
Krňávek, Martin ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains theoretical description of basic features and principles of electron microscopy, with focus on environmental scanning electron microscopy. It describes function of the microscope, interactions that takes place after collision of electron pack with a sample, mainly it describes creation of back reflected electrons and secondary electrons and methods of voltage contrast. The practical part focus on voltage contrast issue by observing decomposition of electric potentials on surface of semiconductor devices and it establishes ideal working conditions for observing voltage contrast by scintillation detector of secondary electrons.
|
|
|
Voltage contrast method in ESEM
Krňávek, Martin ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains theoretical description of basic features and principles of electron microscopy, with focus on environmental scanning electron microscopy. It describes function of the microscope, interactions that takes place after collision of electron pack with a sample, mainly it describes creation of back reflected electrons and secondary electrons and methods of voltage contrast. The practical part focus on voltage contrast issue by observing decomposition of electric potentials on surface of semiconductor devices and it establishes ideal working conditions for observing voltage contrast by scintillation detector of secondary electrons.
|
|
|
Using Cosmos FloWorks for analyse the detector.
Bordovský, Petr ; Špinka, Jiří (referee) ; Maxa, Jiří (advisor)
This work deal with the analysis of influence of pressure‘s sizes in vacuum chamber of specimen Evironmental Scanning Electron Microscope and the influence of sizes of aperture diaphragm by scintillation detector. The analysis proceeds in detector of secondary electrons. The detector is modelled by system 3D CAD SolidWorks with the help of system CAE Cosmos FloWorks.
|
|
|
Ionization Detector for Variable Pressure SEM
Černoch, David ; Špinka, Jiří (referee) ; Jirák, Josef (advisor)
This graduation theises deal with influence of an additional grating possitioned berween the sample and the ionisation detektor of the environmental scannin elektron microscope on signal detection. Signal level is measured for changing pressure, at different voltages on the aditional grating, at different sample - additional electrode distance and at different sample - detektor distance. Influence of the additional grating is simulated for real working conditions on PC.
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